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This book was developed with the goal of providing an easily understood text for those users of the scanning electron microscope (SEM) who have little or no background in the area. The SEM is routinely used to study the surface structure and chemistry of a wide range of biological and synthetic materials at the micrometer to nanometer scale. Ease-of-use, typically facile sample preparation, and straightforward image interpretation, combined with high resolution, high depth of field, and the ability to undertake microchemical and crystallographic analysis, has made scanning electron microscopy one of the most powerful and versatile techniques for characterization today. Indeed, the SEM is a vital tool for the characterization of nanostructured materials and the development of nanotechnology. However, its wide use by professionals with diverse technical backgrounds-including life science, materials science, engineering, forensics, mineralogy, etc., and in various sectors of government, industry, and academia-emphasizes the need for an introductory text providing the basics of effective SEM imaging.A Beginners' Guide to Scanning Electron Microscopy explains instrumentation, operation, image interpretation and sample preparation in a wide ranging yet succinct and practical text, treating the essential theory of specimen-beam interaction and image formation in a manner that can be effortlessly comprehended by the novice SEM user. This book
This book was developed with the goal of providing an easily understood text for those users of the scanning electron microscope (SEM) who have little or no background in the area. The SEM is routinely used to study the surface structure and chemistry of a wide range of biological and synthetic materials at the micrometer to nanometer scale. Ease-of-use, typically facile sample preparation, and straightforward image interpretation, combined with high resolution, high depth of field, and the ability to undertake microchemical and crystallographic analysis, has made scanning electron microscopy one of the most powerful and versatile techniques for characterization today. Indeed, the SEM is a vital tool for the characterization of nanostructured materials and the development of nanotechnology. However, its wide use by professionals with diverse technical backgrounds-including life science, materials science, engineering, forensics, mineralogy, etc., and in various sectors of government, industry, and academia-emphasizes the need for an introductory text providing the basics of effective SEM imaging.A Beginners' Guide to Scanning Electron Microscopy explains instrumentation, operation, image interpretation and sample preparation in a wide ranging yet succinct and practical text, treating the essential theory of specimen-beam interaction and image formation in a manner that can be effortlessly comprehended by the novice SEM user. This book
Introduction.- What is the SEM.- Image Resolution in the SEM.- Image Formation in the SEM.- Information obtained using the SEM.- Brief History of the SEM Development.- Components of the SEM.- Primary Components.- Electron Column.- Electron Gun.- Thermionic Emission Electron Guns.- Tungsten Filament Guns.- Lanthalum Hexaboride (LaB6) Emitter Guns.- Field Emission Electron Guns.- Electromagnetic Lenses.- Condenser Lenses.- Objective Lenses.- Pinhole Lens.- Immersion Lens.- Snorkel Lens.- Lens Aberrations.- Spherical Aberration.- Chromatic Aberration.- Astigmatism.- Scan Coils.- Objective Aperture.- Specimen Chamber.- Specimen Stage.- CCD Camera.- Detectors.- Secondary Electron Detector (SED).- Backscattered Electron Detector (BSED).- Energy Dispersive X-ray Spectrometer (EDS Detector).- Low Vacuum Detector.- Low Voltage High Contrast Detector.- Through-the-lens Detector.- Electron Backscattered Diffraction (EBSD) Detector.- Scanning Transmission Electron Microscopy (STEM) Detector.- Computer Control System.- Secondary Components.- Vacuum System.- Chiller.- Heater.- Electronics.- Anti-Vibration Platform.- Specialized Equipment.- Focused Ion Beam (FIB) Instrument.- Combined Focused Ion Beam-Scanning Electron Microscope.- Beam-Specimen Interaction.- Atom Model.- Elastic Scattering.- Inelastic Scattering.- Effect of Electron Scattering.- Interaction Volume.- Electron Range.- Signals Obtained From the Specimen.- Backscattered Electrons.- Secondary Electrons.- Characteristic X-Ray Lines.- White Radiation.- X-Ray Fluorescence.- Cathodoluminescence Radiation.- Imaging with the SEM.- Image Formation in the SEM.- Magnification.- Resolution.- Depth of Field.- Contrast.- Secondary Electron Imaging.- Backscattered Electron Imaging.- Influence of Various Factors on SEM Imaging.- Effect of Accelerating Voltage.- Effect of Probe Current.- Effect of Working Distance.- Effect of Objective Aperture.- Effect of Tilt.- Astigmatism.- Image Distortion.- Incorrect Alignment.- Beam Damage.- Charging.- Edge Effect.- Sample direction with respect to the Detector Position.- Factors affecting Image Quality: Indications-Causes-Remedies.- Summary of Specialized Imaging Techniques.- Imaging at Low Vacuum.- Imaging at Low Voltage.- Environmental SEM.- Imaging at Low/Elevated Temperature.- Imaging Samples under Stress.- Use of Tilt and Rotation during Imaging.- Use of STEM detector in SEM.- Use of EBSD in SEM.- SEM Operation.- Specimen Insertion.- Image Acquisition.- Microscope Alignment.- Image Quality.- High Resolution Imaging.- Maintenance of the SEM.- Microchemical Analysis with the SEM.- Working of the EDS Detector.- Characteristics of the EDS Detector.- Qualitative EDS Analysis.- Quantitative EDS Analysis.- Atomic Number (Z) Effect.- X-ray Absorption (A) Effect.- X-ray Fluorescence (F) Effect.- ZAF Corrections.- Standardless Analysis.- Trace Element Analysis.- Sample Preparation.- Metals, Alloys, Ceramics and Semiconductors.- Polymers.- Geological Samples.- Biological Samples.- Semiconductors.- Use of Focused Ion Beam.
Anwar Ul-Hamid received his B.Sc. in Metallurgical Engineering
and Materials Science at the University of Engineering &
Technology in Lahore, Pakistan in 1991. He received his Ph.D,.
for Oxidation of High Temperature alloys/Analytical Electron
Microscopy at the Department of Materials Science & Metallurgy at
the University of Cambridge in 1996.
He has published over 70 peer-reviewed papers in journals and
proceedings, and is currently Coordinator of the Materials
Characterization Laboratory (MCL)/Research Institute at King Fahd
University of Petroleum & Minerals, in Dhahran, Saudi Arabia.
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